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Sensorless enhancement of an atomic force microscope micro-cantilever quality factor using piezoelectric shunt control
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10.1063/1.4805108
/content/aip/journal/rsi/84/5/10.1063/1.4805108
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4805108
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Tapping mode AFM instrumentation.

Image of FIG. 2.
FIG. 2.

DMASP micro-cantilever frequency response (- -) and fitted model (—).

Image of FIG. 3.
FIG. 3.

Frequency response of the DMASP micro-cantilever electrical impedance.

Image of FIG. 4.
FIG. 4.

Piezoelectric AFM micro-cantilever with attached shunt circuit.

Image of FIG. 5.
FIG. 5.

Block diagram of the piezoelectric shunt control system.

Image of FIG. 6.
FIG. 6.

Feedback interpretation of the transfer function from a disturbance to tip displacement .

Image of FIG. 7.
FIG. 7.

Piezoelectric shunt control circuit implemented with a synthetic impedance.

Image of FIG. 8.
FIG. 8.

Admittance filter ().

Image of FIG. 9.
FIG. 9.

Piezoelectric shunt control circuit implemented with a synthetic impedance. In this schematic the admittance filter () is implemented with operational amplifiers.

Image of FIG. 10.
FIG. 10.

Root locus of () when δ = 1. A zoomed in view of the section inside the red square is shown in Fig. 11 .

Image of FIG. 11.
FIG. 11.

Upper left quadrant of the root locus of () when δ = 1 ( ∈ [ − ∞, 0]).

Image of FIG. 12.
FIG. 12.

Frequency response of with no active piezoelectric shunt control (- -) and with a shunt impedance consisting of an inductance of 313.56 mH and a negative resistance of −3150 Ω (—).

Image of FIG. 13.
FIG. 13.

Frequency response of with no active piezoelectric shunt control (- -) and with a shunt impedance consisting of an inductance of 306.10 mH and a negative resistance of −2450 Ω (—).

Image of FIG. 14.
FIG. 14.

Images of the gold cluster sample obtained at a scan speed of 1 μm/s with and without enhancement of the cantilever factor. The scan area is 350 nm × 350 nm. (a) factor 178, no shunt control. (b) factor 410, with shunt control.

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/content/aip/journal/rsi/84/5/10.1063/1.4805108
2013-05-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Sensorless enhancement of an atomic force microscope micro-cantilever quality factor using piezoelectric shunt control
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/5/10.1063/1.4805108
10.1063/1.4805108
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