1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Simulated annealing–simplex hybrid algorithm for ellipsometric data inversion of multilayer films
Rent:
Rent this article for
USD
10.1063/1.4808463
/content/aip/journal/rsi/84/6/10.1063/1.4808463
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/6/10.1063/1.4808463

Figures

Image of FIG. 1.
FIG. 1.

Flowchart of simulated annealing–simplex hybrid algorithm. Reproduced by permission from Fan , . Copyright 2012 by IEEE.

Image of FIG. 2.
FIG. 2.

Relationships between (, Δ) and the incident angle for the multilayer film AlO/TiO/SiN/SiO/Si.

Image of FIG. 3.
FIG. 3.

Relationships between the errors of optical parameters and the thicknesses of the multilayer film AlO/TiO/SiN/SiO/Si.

Tables

Generic image for table
Table I.

Inversion results of two arbitrary parameters.

Generic image for table
Table II.

Inversion results of four arbitrary parameters.

Generic image for table
Table III.

Inversion results of four parameters of the double-layer films and comparisons. Reproduced by permission from Fan , . Copyright 2012 by IEEE.

Loading

Article metrics loading...

/content/aip/journal/rsi/84/6/10.1063/1.4808463
2013-06-10
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Simulated annealing–simplex hybrid algorithm for ellipsometric data inversion of multilayer films
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/6/10.1063/1.4808463
10.1063/1.4808463
SEARCH_EXPAND_ITEM