Schematic of the four channels imaging system. (a) 3D view. (b) Sketch map in the YOZ and XOY plane. Four primary mirrors (concave) and secondary mirror compose four imaging channels, so, four images can be generated by this objective.
MTF curve of the four channels objective.
Schematic of the secondary (convex) mirror.
Reflectivity of the four channel objective at the energies of 50 eV, 95 eV, 150 eV, and 50–100 eV.
Methods of measuring decentration of secondary mirror. (a) Direct detection. (b) Measure program with the aid of accessory lens.
Measured results of centering error of biconvex lens and the secondary mirror.
Optical path of the imaging experiments.
EUV images obtained by the four channel imaging system.
Intensity profile traced along the white line in Fig. 8(a) , showing a resolution measured along the edge of 33 μm.
Specifications of the four channels objective.
Specifications of the substrates and multilayer films.
Experimental parameters of EUV imaging.
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