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A novel extreme ultraviolet four channels normal incidence imaging system for plasma diagnostics of Z-pinch facility
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10.1063/1.4812444
/content/aip/journal/rsi/84/7/10.1063/1.4812444
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/7/10.1063/1.4812444

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the four channels imaging system. (a) 3D view. (b) Sketch map in the YOZ and XOY plane. Four primary mirrors (concave) and secondary mirror compose four imaging channels, so, four images can be generated by this objective.

Image of FIG. 2.
FIG. 2.

MTF curve of the four channels objective.

Image of FIG. 3.
FIG. 3.

Schematic of the secondary (convex) mirror.

Image of FIG. 4.
FIG. 4.

Reflectivity of the four channel objective at the energies of 50 eV, 95 eV, 150 eV, and 50–100 eV.

Image of FIG. 5.
FIG. 5.

Methods of measuring decentration of secondary mirror. (a) Direct detection. (b) Measure program with the aid of accessory lens.

Image of FIG. 6.
FIG. 6.

Measured results of centering error of biconvex lens and the secondary mirror.

Image of FIG. 7.
FIG. 7.

Optical path of the imaging experiments.

Image of FIG. 8.
FIG. 8.

EUV images obtained by the four channel imaging system.

Image of FIG. 9.
FIG. 9.

Intensity profile traced along the white line in Fig. 8(a) , showing a resolution measured along the edge of 33 m.

Tables

Generic image for table
Table I.

Specifications of the four channels objective.

Generic image for table
Table II.

Specifications of the substrates and multilayer films.

Generic image for table
Table III.

Experimental parameters of EUV imaging.

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/content/aip/journal/rsi/84/7/10.1063/1.4812444
2013-07-15
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A novel extreme ultraviolet four channels normal incidence imaging system for plasma diagnostics of Z-pinch facility
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/7/10.1063/1.4812444
10.1063/1.4812444
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