Sketch of the wall current probe design.
Schematic view of the experimental setup METRIS.
Current density measured by the wall current probes as a function of the position in the reactor. The axis origin corresponds to the bottom position of the left inside wall in Figure 2 . The pressure is 3 mTorr and the input power is 200 W.
(a) Ion and (b) electron current density as a function of the position in the reactor. The ion current density is measured using the wall current probes as planar Langmuir probes. The electron density current is deduced from the data plotted in Figure 3 . The pressure is 3 mTorr and the input power is 200 W.
Net current density as a function of time in the afterglow of a pulsed RF discharge at different positions on WCP1 (see Figure 2 ). P1 and P4 correspond to the edge probe and the central probe, respectively. P2 and P3 correspond to intermediate probes between P1 and P4. The pressure is 20 mTorr and the input power is 800 W.
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