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Wall current probe: A non-invasive in situ plasma diagnostic for space and time resolved current density distribution measurement
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10.1063/1.4815823
/content/aip/journal/rsi/84/8/10.1063/1.4815823
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/8/10.1063/1.4815823
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Sketch of the wall current probe design.

Image of FIG. 2.
FIG. 2.

Schematic view of the experimental setup METRIS.

Image of FIG. 3.
FIG. 3.

Current density measured by the wall current probes as a function of the position in the reactor. The axis origin corresponds to the bottom position of the left inside wall in Figure 2 . The pressure is 3 mTorr and the input power is 200 W.

Image of FIG. 4.
FIG. 4.

(a) Ion and (b) electron current density as a function of the position in the reactor. The ion current density is measured using the wall current probes as planar Langmuir probes. The electron density current is deduced from the data plotted in Figure 3 . The pressure is 3 mTorr and the input power is 200 W.

Image of FIG. 5.
FIG. 5.

Net current density as a function of time in the afterglow of a pulsed RF discharge at different positions on WCP1 (see Figure 2 ). P1 and P4 correspond to the edge probe and the central probe, respectively. P2 and P3 correspond to intermediate probes between P1 and P4. The pressure is 20 mTorr and the input power is 800 W.

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/content/aip/journal/rsi/84/8/10.1063/1.4815823
2013-08-02
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Wall current probe: A non-invasive in situ plasma diagnostic for space and time resolved current density distribution measurement
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/8/10.1063/1.4815823
10.1063/1.4815823
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