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Piezoelectric bimorph-based scanner in the tip-scan mode for high speed atomic force microscope
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10.1063/1.4818976
    + View Affiliations - Hide Affiliations
    Affiliations:
    1 School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing 100191, People's Republic of China
    2 Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education), Beihang University, Beijing 100191, People's Republic of China
    3 Department of Applied Physics, Beihang University, Beijing 100191, People's Republic of China
    a) Author to whom correspondence should be addressed. Electronic mail: gyshang@buaa.edu.cn
    Rev. Sci. Instrum. 84, 083706 (2013); http://dx.doi.org/10.1063/1.4818976
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/content/aip/journal/rsi/84/8/10.1063/1.4818976
2013-08-27
2014-08-20
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Scitation: Piezoelectric bimorph-based scanner in the tip-scan mode for high speed atomic force microscope
http://aip.metastore.ingenta.com/content/aip/journal/rsi/84/8/10.1063/1.4818976
10.1063/1.4818976
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