Schematic of the assembly of the bimorph-based scanner and the brass holder (a), and photography of the assembly and a PZT-5 sample mounted on the tube scanner (b).
Block diagram of the high speed AFM system based on the PCI-6115 DAQ card with 4 A/D and 2 D/A channels. When DA0 and DA1 synchronously generate signals to drive the bimorph scanning in x-direction and the tube scanner in y-direction respectively, the AFM deflection signal is synchronously acquired by AD1 for high speed imaging. The piezo-voltage induced by the detection piezo-layer of the bimorph is fed to AD0 for real-time phase compensation and correction of the image distortion caused by sine scanning. A compensation signal from y-scan voltage was used to input into the high-voltage amplifier in z-direction to minimize the additional deflection signal due to the surface tilt.
(a) Measured scan range as a function of the driving voltage. (b) Frequency spectrum of the induced piezo-voltage of the bimorph.
Uncorrected high speed AFM image (a) and its section profile (c) and corrected ones (b) and (d) of the standard grating done by real-time subtraction of the pre-measured deflection signal (e) line by line.
High speed AFM images of (a) the silicon grating with a scan range of 9 × 9 μm2 and (b) the surface morphology of a commercially available ITO film with a scan range of 1 × 1 μm2.
(a)–(f) Images of the PZT-5 sample taken sequentially with an interval time of 1.264 s and each image acquired in 31.6 ms as the electric field (marked by E) increased from 0 to 40 V/mm. The scan area is 5 × 5 μm2. (g) The line profiles obtained in the area marked by the solid line in (a)–(f). The volume of the pore in the lower-left corner got larger as the electric field increased.
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