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Ion implantation technology and ion sourcesa)
a)Contributed paper, published as part of the Proceedings of the 15th International Conference on Ion Sources, Chiba, Japan, September 2013.
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10.1063/1.4854155
/content/aip/journal/rsi/85/2/10.1063/1.4854155
http://aip.metastore.ingenta.com/content/aip/journal/rsi/85/2/10.1063/1.4854155
/content/aip/journal/rsi/85/2/10.1063/1.4854155
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/content/aip/journal/rsi/85/2/10.1063/1.4854155
2014-01-16
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Ion implantation technology and ion sourcesa)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/85/2/10.1063/1.4854155
10.1063/1.4854155
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