1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Multi-cusp ion source for doping process of flat panel display manufacturinga)
a)Contributed paper, published as part of the Proceedings of the 15th International Conference on Ion Sources, Chiba, Japan, September 2013.
Rent:
Rent this article for
USD
10.1063/1.4855017
/content/aip/journal/rsi/85/2/10.1063/1.4855017
http://aip.metastore.ingenta.com/content/aip/journal/rsi/85/2/10.1063/1.4855017
/content/aip/journal/rsi/85/2/10.1063/1.4855017
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/rsi/85/2/10.1063/1.4855017
2014-01-13
2014-08-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multi-cusp ion source for doping process of flat panel display manufacturinga)
http://aip.metastore.ingenta.com/content/aip/journal/rsi/85/2/10.1063/1.4855017
10.1063/1.4855017
SEARCH_EXPAND_ITEM