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Comparison between transient and frequency modulated excitation: Application to silicon nitride and aluminum oxide coatings of silicon
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Contactless measurements of the lifetime of charge carriers are presented with varying ways of photo excitation: with and without bias light and pulsed and frequency modulated. These methods are applied to the study of the surface passivation of single crystalline silicon by a-SiNx:H and Al 2O3 coatings. The properties of these coatings are investigated under consideration of the merits of the different methods.
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