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Comparison between transient and frequency modulated excitation: Application to silicon nitride and aluminum oxide coatings of silicon
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/content/aip/journal/rsi/85/6/10.1063/1.4880201
2014-06-06
2015-04-21

Abstract

Contactless measurements of the lifetime of charge carriers are presented with varying ways of photo excitation: with and without bias light and pulsed and frequency modulated. These methods are applied to the study of the surface passivation of single crystalline silicon by a-SiN:H and Al O coating. The properties of these coatings are investigated under consideration of the merits of the different methods.

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Scitation: Comparison between transient and frequency modulated excitation: Application to silicon nitride and aluminum oxide coatings of silicon
http://aip.metastore.ingenta.com/content/aip/journal/rsi/85/6/10.1063/1.4880201
10.1063/1.4880201
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