No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Ultraprecision XY stage using a hybrid bolt-clamped Langevin-type ultrasonic linear motor for continuous motion
3.Y. Li, S. Xiao, L. Xi, and Z. Wu, “Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage,” Int. J. Precis. Eng. Manuf. 15(4), 735–744 (2014).
4.Y. Peng, S. Ito, Y. Sakurai, Y. Shimizu, and W. Gao, “Construction and verification of a linear-rotary microstage with a millimeter-scale range,” Int. J. Precis. Eng. Manuf. 14(9), 1623–1628 (2013).
8.H. Zhang, S. Dong, S. Zhang, T. Wang, Z. Zhang, and L. Fan, “Ultrasonic micro-motor using miniature piezoelectric tube with diameter of 1.0 mm,” Ultrasonics 44, e603–e606 (2006).
12.D. Sun, S. Wang, S. Hata, J. Sakurai, and A. Shimokohbe, “Driving mechanism and experimental realization of a cylindrical ultrasonic linear microactuator,” Microelectron. Eng. 86(4–6), 1262–1266 (2009).
13.J. Yoo, S. Lee, J. Hong, H. Song, D. Park, and E. Hwang, “Design and simulation of ultrasonic linear motor using multilayer ceramic actuator,” in Sixteenth IEEE International Symposium on Applications of Ferroelectrics, ISAF 2007 (IEEE, 2007), pp. 792–794.
14.T. Sashida and T. Kenjo, “An introduction to ultrasonic motors,” Monographs in Electrical and Electronic Engineering (Clarendon Press, 1993), Vol. 28.
15.C.-H. Yun, T. Ishii, K. Nakamura, S. Ueha, and K. Akashi, “Holding mechanism using a resonance system for a high-power ultrasonic linear motor,” Jpn. J. Appl. Phys., Part 1 41, 3261–3266 (2002).
16.L. A. Tuan, J.-J. Kim, S.-G. Lee, T.-G. Lim, and L. C. Nho, “Second-order sliding mode control of a 3D overhead crane with uncertain system parameters,” Int. J. Precis. Eng. Manuf. 15(5), 811–819 (2014).
17.F.-J. Lin, R.-J. Wai, K.-K. Shyu, and T.-M. Liu, “Recurrent fuzzy neural network control for piezoelectric ceramic linear ultrasonic motor drive,” IEEE Trans. Ultrason. Eng. 48(4), 900–913 (2001).
18.L. A. Tuan, S.-G. Lee, L. C. Nho, and D. H. Kim, “Model reference adaptive sliding mode control for three dimensional overhead cranes,” Int. J. Precis. Eng. Manuf. 14(8), 1329–1338 (2013).
19.W. Panusittikorn, M. C. Lee, and P. I. Ro, “Modeling and sliding-mode control of friction-based object transport using two-mode ultrasonic excitation,” IEEE Trans. Ind. Electron. 51(4), 917–926 (2004).
20.F.-J. Lin, R.-J. Wai, and C.-C. Lee, “Fuzzy neural network position controller for ultrasonic motor drive using push-pull DC-DC converter,” IEE Proc.: Control Theory Appl. 146(1), 99–107 (1999).
21.F.-J. Lin, “Fuzzy adaptive model-following position control for ultrasonic motor,” IEEE Trans. Power Electron. 12(2), 261–268 (1997).
22.P. Smithmaitrie, P. Suybangdum, P. Laoratanakul, and N. Muensit, “Design and performance testing of an ultrasonic linear motor with dual piezoelectric actuators,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control 59(5), 1033–1042 (2012).
24.W.-S. Kim, C.-H. Yun, and S.-K. Lee, “Nano positioning of a high power ultrasonic linear motor,” Jpn. J. Appl. Phys., Part 1 47(7), 5687–5692 (2008).
26.T. Senjyu, T. Kashiwagi, and K. Uezato, “Position control of ultrasonic motors using MRAC and dead-zone compensation with fuzzy inference,” IEEE Trans. Power Electron. 17(2), 265–272 (2002).
27.W.-S. Kim, D.-J. Lee, and S.-K. Lee, “Influence of a high vacuum on the precise positioning using an ultrasonic linear motor,” Rev. Sci. Instrum. 82(1), 15112 (2011).
28. Wahyudi, K. Sato, and A. Shimokohbe, “Characteristics of practical control for point-to-point (PTP) positioning systems: Effect of design parameters and actuator saturation on positioning performance,” Precis. Eng. 27(2), 157–169 (2003).
31.K. Sato, J. Zheng, T. Tanaka, and A. Shimokohbe, “Micro/macro dynamic characteristics of mechanism with a harmonic speed reducer and precision rotational positioning control using disturbance observer,” JSME Int. J., Ser. C 43(2), 318–325 (2000).
32.S. Hashimoto, K. Ohishi, T. Ohishi, T. Ishikawa, K. Kosaka, Y. Egashira, H. Kubota, and T. Ohmi, “Development of an ultra-precision stage control system using nonresonant ultrasonic motor,” in 29th Annual Conference of the IEEE Industrial Electronics Society, IECON ’03 (IEEE, 2003) Vol. 2, pp. 1331–1336.
36.H. K. Lam, F. H. F. Leung, and P. K.-S. Tam, “A switching controller for uncertain nonlinear systems,” IEEE Control Syst. Mag. 22(1), 7–14 (2002).
38.K. Ogata, Modern Control Engineering, 5th ed. (Prentice Hall, Boston, 2009).
Article metrics loading...
This paper presents a design and control system for an XY stage driven by an ultrasonic linear motor. In this study, a hybrid bolt-clamped Langevin-type ultrasonic linear motor was manufactured and then operated at the resonance frequency of the third longitudinal and the sixth lateral modes. These two modes were matched through the preload adjustment and precisely tuned by the frequency matching method based on the impedance matching method with consideration of the different moving weights. The XY stage was evaluated in terms of position and circular motion. To achieve both fine and stable motion, the controller consisted of a nominal characteristics trajectory following (NCTF) control for continuous motion, dead zone compensation, and a switching controller based on the different NCTFs for the macro- and micro-dynamics regimes. The experimental results showed that the developed stage enables positioning and continuous motion with nanometer-level accuracy.
Full text loading...
Most read this month