No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers
1.V. B. Elings and J. A. Gurley, “Jumping probe microscope,” U.S. patent 5266801 (30 November 1993).
2.S. P. Jarvis, H. Yamada, S.-I. Yamamoto, and H. Tokumoto, “A new force controlled atomic force microscope for use in ultrahigh vacuum,” Rev. Sci. Instrum. 67, 2281 (1996).
3.S. Lindsay, “Controlled force microscope for operation in liquids,” U.S. patent US5515719 A (14 May 1996).
4.G. C. Ratcliff, D. A. Erie, and R. Superfine, “Photothermal modulation for oscillating mode atomic force microscopy in solution,” Appl. Phys. Lett. 72, 1911 (1998).
5.A. Labuda, K. Kobayashi, Y. Miyahara, and P. Grütter, “Retrofitting an AFM with photothermal excitation for a clean cantilever response in low Q environments,” Rev. Sci. Instrum. 83, 053702 (2012).
6.J. W. Hong, Z. G. Khim, A. S. Hou, and S. Park, “Tapping mode atomic force microscopy using electrostatic force modulation,” Appl. Phys. Lett. 69, 2831 (1996).
7.N. Kato, I. Suzuki, H. Kikuta, and K. Iwata, “Force-balancing microforce sensor with an optical-fiber interferometer,” Rev. Sci. Instrum. 68, 2475 (1997).
8.T. Yagi and S. Yasuda, “Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus,” U.S. patent US5753911 A (19 May 1998).
10.T. E. Schäffer, J. P. Cleveland, F. Ohnesorge, D. A. Walters, and P. K. Hansma, “Studies of vibrating atomic force microscope cantilevers in liquid,” J. Appl. Phys. 80, 3622 (1996).
11.A. Labuda, K. Kobayashi, D. Kiracofe, K. Suzuki, P. H. Grütter, and H. Yamada, “Comparison of photothermal and piezoacoustic excitation methods for frequency and phase modulation atomic force microscopy in liquid environments,” AIP Adv. 1, 022136 (2011).
13.A. Labuda, Y. Miyahara, L. Cockins, and P. H. Grütter, “Decoupling conservative and dissipative forces in frequency modulation atomic force microscopy,” Phys. Rev. B 84, 125433 (2011).
14.A. G. Onaran, M. Balantekin, W. Lee, W. L. Hughes, B. A. Buchine, R. O. Guldiken, Z. Parlak, C. F. Quate, and F. L. Degertekin, “A new atomic force microscope probe with force sensing integrated readout and active tip,” Rev. Sci. Instrum. 77, 023501 (2006).
15.S. Rana, P. M. Ortiz, A. J. Harris, J. S. Burdess, and C. J. McNeil, “An electrostatically actuated cantilever device capable of accurately calibrating the cantilever on-chip for AFM-like applications,” J. Micromech. Microeng. 19, 045012 (2009).
16.E. Sarajlic, M. H. Siekman, H. Fujita, L. Abelmann, and N. Tas, “A novel electrostatically actuated AFM probe for vibroflexural mode operation,” in Proceedings of IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) (IEEE, 2011), p. 537.
17.V. Yakimov and R. Erlandsson, “Electrostatic force-feedback sensor incorporated in an ultrahigh vacuum force microscope,” Rev. Sci. Instrum. 71, 133 (2000).
18.S. Hong, J. Woo, H. Shin, J. U. Jeon, Y. E. Pak, E. L. Colla, N. Setter, E. Kim, and K. No, “Principle of ferroelectric domain imaging using atomic force microscope,” J. Appl. Phys. 89, 1377 (2001).
21.S. Hudlet, M. Saint Jeana, C. Guthmann, and J. Berger, “Evaluation of the capacitive force between an atomic force microscopy tip and a metallic surface,” Eur. Phys. J. B 2, 5 (1998).
22.D. Pires, J. L. Hedrick, A. De Silva, J. Frommer, B. Gotsmann, H. Wolf, M. Despont, U. Duerig, and A. W. Knoll, “Nanoscale three-dimensional patterning of molecular resists by scanning probes,” Science 328, 732 (2010).
23.P. Pingue, V. Piazza, P. Baschieri, C. Ascoli, C. Menozzi, A. Alessandrini, and P. Facci, “Demonstration of an electrostatic-shielded cantilever,” Appl. Phys. Lett. 88, 043510 (2006).
24.U. Rabe, S. Amelio, E. Kester, V. Scherer, S. Hirsekorn, and W. Arnold, “Quantitative determination of contact stiffness using atomic force acoustic microscopy,” Ultrasonics 38, 430 (2000).
25.P. A. Yuya, D. C. Hurley, and J. A. Turner, “Contact-resonance atomic force microscopy for viscoelasticity,” J. Appl. Phys. 104, 074916 (2008).
26.D. C. Hurley, in Applied Scanning Probe Methods Vol. XI, edited by B. Bhushan and H. Fuchs (Springer-Verlag, Berlin, 2009), Chap. 5, pp. 97–138.
29.U. Rabe, in Applied Scanning Probe Methods Vol. II, edited by B. Bhushan and H. Fuchs (Springer, Berlin, 2006), Chap. 2, pp. 37–90.
30.M. Reinstädtler, T. Kasai, U. Rabe, B. Bhushan, and W. Arnold, “Imaging and measurement of elasticity and friction using the TRmode,” J. Phys. D: Appl. Phys. 38, R269 (2005).
31.C. Su and R. C. Daniels, “Method and apparatus of driving torsional resonance mode of a probe-based instrument,” U.S. patent US7168301 B2(30 January2007).
32.M. Reinstädtler, U. Rabe, V. Scherer, U. Hartmann, A. Goldade, B. Bhushan, and W. Arnold, “On the nanoscale measurement of friction using atomic-force microscope cantilever torsional resonances,” Appl. Phys. Lett. 82, 2604 (2003).
35.K. Umeda, K. Kobayashi, K. Matsushige, and H. Yamada, “Direct actuation of cantilever in aqueous solutions by electrostatic force using high-frequency electric fields,” Appl. Phys. Lett. 101, 123112 (2012).
36. The full description of the procedures used in this article requires the identification of certain commercial products and their suppliers. The inclusion of such information should in no way be construed as indicating that such products or suppliers are endorsed by NIST or are recommended by NIST or that they are necessarily the best materials, instruments, software, or suppliers for the purposes described.
38.K. H. Chung, G. A. Shaw, and J. R. Pratt, “Accurate noncontact calibration of colloidal probe sensitivities in atomic force microscopy,” Rev. Sci. Instrum. 80, 065107 (2009).
Article metrics loading...
Piezoelectric actuation of atomic force microscope
(AFM) cantilevers often suffers from spurious mechanical resonances in the loop between the signal driving the cantilever and the actual tip motion. These spurious resonances can reduce the accuracy of AFM measurements and in some cases completely obscure the cantilever response. To address these limitations, we developed a specialized AFM cantilever holder for electrostatic actuation of AFM cantilevers. The holder contains electrical contacts for the AFM cantilever chip, as well as an electrode (or electrodes) that may be precisely positioned with respect to the back of the cantilever. By controlling the voltages on the AFM cantilever and the actuation electrode(s), an electrostatic force is applied directly to the cantilever, providing a near-ideal transfer function from drive signal to tip motion. We demonstrate both static and dynamic actuations, achieved through the application of direct current and alternating current voltage schemes, respectively. As an example application, we explore contact resonance
atomic force microscopy, which is a technique for measuring the mechanical properties of surfaces on the sub-micron length scale. Using multiple electrodes, we also show that the torsional resonances of the AFM cantilever may be excited electrostatically, opening the door for advanced dynamic lateral force measurements with improved accuracy and precision.
Full text loading...
Most read this month