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We present the design of a split-and-delay unit for the production of two delayed replicas of an incident extreme ultraviolet (XUV) pulse. The device features a single grazing incidence reflection in combination with attenuation of remaining infrared light co-propagating with the XUV beam, offering a high throughput without the need of introducing additional optics that would further decrease the XUV flux. To achieve the required spatial and temporal stabilities, the device is controlled by two PID-controllers monitoring the delay and the beam pointing using an optical reference laser beam, making collimation of the beam by additional optics unnecessary. Finally, we demonstrate the stability of the split-and-delay unit by performing all-reflective autocorrelation measurements on broadband few-cycle laser pulses.


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