- Conference date: 26-30 March 2000
- Location: Oxford (England)
The low pressure plasma processing environment is complex and presents many diagnostic challenges. Here the diagnostic techniques used for accurate and detailed measurement of the density and energy distributions of charged and neutral species are reviewed. Most of the techniques rely heavily on atomic and molecular data. The specific data needs of each diagnostic are outlined. It is shown that in total these data needs are vast and diverse and cannot all be met from specific measurements or calculations. The real need is for generic scaling rules for each of the significant atomic and molecular processes.
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