- Conference date: 26-30 March 2000
- Location: Oxford (England)
A modeling network has been developed for Ar glow discharges with Cu cathode, consisting of several submodels, i.e., Monte Carlo simulations, fluid approaches and collisional-radiative models. The plasma species described in the models, include the electrons, Ar atoms, Ar ions, fast Ar atoms, Ar atoms in various excited levels, sputtered Cu atoms and Cu ions, both in the ground state and in various excited levels. In this paper, the models are described, and the various input data needed for the calculations are discussed. Typical results of the models include the electrical characteristics, the potential and electric field distribution, the densities, fluxes and energies of the various plasma species, information about collision processes in the plasma and about sputtering at the cathode, optical emission intensities, etc. Some of these results will be presented here, to illustrate the possibilities of the model.
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