The TOF-RIMS Mass Spectrometer, developed at AMTEL, has been successfully applied for quantitative trace element analysis of Au, Pd and Rh in sulphides, iron oxides and silicates. A series of experiments were conducted in order to test the applicability and determine the detection sensitivity of several one and two step resonant ionization schemes related to Au, Pd and Rh. The experimental data are compared with the corresponding theoretical estimates. Attained minimum detection limits are in the 8–17 ppb range with precision of ±15%. A comparative study of minerals by Dynamic SIMS and TOF-RIMS in the overlapping range of detection sensitivities for Au, Pd and Rh shows good correlation of the quantified data.