Synthesis of vertically aligned carbon nanotubes on a large area using thermal chemical vapor deposition
- Conference date: 15-18 Jan 2001
- Location: Kamakura (Japan)
Vertically well-aligned carbon nanotubes (CNTs) were homogeneously grown on iron deposited silicon oxide substrate by thermal chemical vapor deposition of acetylene. The CNTs have an uniform length of 100 μm and a diameter in the range from 100 to 200 nm. The CNTs reveal closed tip and very clean surface without any carbonaceous particles. The CNTs have no encapsulated iron particles at the closed tip and a bamboo structure in which the curvature of compartment layers is directed to the tip.
- Carbon nanotubes
- Chemical vapor deposition
- Dielectric oxides
- Surface cleaning
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Y. K. Semertzidis, M. Aoki, M. Auzinsh, V. Balakin, A. Bazhan, G. W. Bennett, R. M. Carey, P. Cushman, P. T. Debevec, A. Dudnikov, F. J. M. Farley, D. W. Hertzog, M. Iwasaki, K. Jungmann, D. Kawall, B. Khazin, I. B. Khriplovich, B. Kirk, Y. Kuno, D. M. Lazarus, L. B. Leipuner, V. Logashenko, K. R. Lynch, W. J. Marciano, R. McNabb, W. Meng, J. P. Miller, W. M. Morse, C. J. G. Onderwater, Y. F. Orlov, C. S. Ozben, R. Prigl, S. Rescia, B. L. Roberts, N. Shafer‐Ray, A. Silenko, E. J. Stephenson, K. Yoshimura and EDM Collaboration
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