- Conference date: 24-27 April 2002
- Location: Gatlinburg, Tennessee (USA)
Different aspects of the modeling of moderate pressure hydrogen and hydrogen methane plasma obtained under conditions relevant to diamond thin films deposition are discussed. First, a collisional‐radiative model (CRM) of H2 plasmas is presented and used in the frame of a quasi‐homogenous plasma assumption to determine the main collisional phenomena that govern hydrogen discharges. The CRM was then used to build up more simplified thermo‐chemical model that was used as a starting point for the development of a transport model for the more complex H2/CH4 plasmas. These have been investigated with a one dimensional (1D) that describes the plasma flow on the symmetry axis of a bell jar reactor. Discussion on the impact of the collisional data used in the different models is especially emphasized.
- Collision theories
- Plasma materials processing
- Elemental semiconductors
- Plasma pressure
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