Different aspects of the modeling of moderate pressure hydrogen and hydrogen methane
plasma obtained under conditions relevant to diamond
thin films deposition are discussed. First, a collisional‐radiative model (CRM) of H2
plasmas is presented and used in the frame of a quasi‐homogenous plasma assumption to determine the main collisional phenomena that govern hydrogen discharges. The CRM was then used to build up more simplified thermo‐chemical model that was used as a starting point for the development of a transport
model for the more complex H2/CH4
plasmas. These have been investigated with a one dimensional (1D) that describes the plasma flow on the symmetry axis of a bell jar reactor. Discussion on the impact of the collisional data used in the different models is especially emphasized.