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Novel methods of synthesis of a‐Si(H)/Mo multilayers for Extreme UV applications
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10.1063/1.1536366
/content/aip/proceeding/aipcp/10.1063/1.1536366
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1536366
/content/aip/proceeding/aipcp/10.1063/1.1536366
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/content/aip/proceeding/aipcp/10.1063/1.1536366
2003-01-24
2014-11-24
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Novel methods of synthesis of a‐Si(H)/Mo multilayers for Extreme UV applications
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1536366
10.1063/1.1536366
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