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Monitoring Sheath Voltages and Ion Energies in High‐Density Plasmas Using Noninvasive Radio‐Frequency Current and Voltage Measurements
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http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1622471
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/content/aip/proceeding/aipcp/10.1063/1.1622471
2003-09-30
2015-02-27
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Monitoring Sheath Voltages and Ion Energies in High‐Density Plasmas Using Noninvasive Radio‐Frequency Current and Voltage Measurements
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1622471
10.1063/1.1622471
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