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UV Photo‐Oxidation of Silicon: A Novel Growth Method of Ultra‐Thin SiO2 Films
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10.1063/1.1796578
/content/aip/proceeding/aipcp/10.1063/1.1796578
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1796578
/content/aip/proceeding/aipcp/10.1063/1.1796578
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/content/aip/proceeding/aipcp/10.1063/1.1796578
2004-08-23
2015-05-23
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Scitation: UV Photo‐Oxidation of Silicon: A Novel Growth Method of Ultra‐Thin SiO2 Films
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1796578
10.1063/1.1796578
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