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Radical kinetics in an inductively‐coupled plasma in CF4
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10.1063/1.1843511
/content/aip/proceeding/aipcp/10.1063/1.1843511
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1843511
/content/aip/proceeding/aipcp/10.1063/1.1843511
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/content/aip/proceeding/aipcp/10.1063/1.1843511
2004-12-01
2015-08-29
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Radical kinetics in an inductively‐coupled plasma in CF4
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1843511
10.1063/1.1843511
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