1887
banner image
Microstructure, Stress, and Stress‐Induced Damages in Damascene Cu
Rent:
Rent this article for
USD
10.1063/1.1845833
/content/aip/proceeding/aipcp/10.1063/1.1845833
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1845833
/content/aip/proceeding/aipcp/10.1063/1.1845833
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/proceeding/aipcp/10.1063/1.1845833
2004-12-08
2015-07-02
This is a required field
Please enter a valid email address

Oops! This section does not exist...

Use the links on this page to find existing content.

229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Microstructure, Stress, and Stress‐Induced Damages in Damascene Cu
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1845833
10.1063/1.1845833
SEARCH_EXPAND_ITEM