Important Notice Regarding Scitation Services

Scitation will be upgrading its access control system between July 4 and July 10, 2014. During this process, existing subscriptions and purchased content will remain available and unaffected, but some site and personal account functionality will be disabled.

Services will be fully restored on July 10, 2014. Thank you for your patience!

Click here for complete details.

1887
banner image
Scaling Impacts on Electromigration in Narrow Single‐Damascene Cu Interconnects
Rent:
Rent this article for
USD
10.1063/1.1845842
Loading

Article metrics loading...

/content/aip/proceeding/aipcp/10.1063/1.1845842
2004-12-08
2014-07-10
This is a required field
Please enter a valid email address
This feature is disabled while Scitation upgrades its access control system.
This feature is disabled while Scitation upgrades its access control system.
229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Scitation|Scaling Impacts on Electromigration in Narrow Single‐Damascene Cu Interconnects
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.1845842
10.1063/1.1845842
SEARCH_EXPAND_ITEM