TEM and SIMS Analysis of (100), (110), and (111) Single Crystal Niobium
- Conference date: 30 October-1 November 2006
- Location: Araxa (Brazil)
Single crystal niobium specimens of (100), (110) and (111) crystal orientations have been analyzed using TEM and SIMS. The TEM specimens were prepared using Focused Ion Beam (FIB) and show niobium oxide thicknesses ranging from 4.9 to 8.3 nm for the three specimens after buffer chemical polishing. The oxide layers appear uniform and no significant sub‐oxide region was noted. SIMS analysis was made for all three orientations on hydrogen, carbon, and oxygen before and after heat treatments at 90, 600, and 1250 °C. Hydrogen is at a high level between the oxide layer and niobium, but at a relatively low level in the oxide. No high oxygen concentration region was noted in the niobium below the oxide. C contamination on the surface is detected mainly at the surface. Analysis after heat treatments showed some decrease in hydrogen after the 600 °C heat treatment, and significant oxidation of the niobium after the 1250 °C heat treatment.
- Heat treatments
- Secondary ion mass spectroscopy
- Surface oxidation
- Transmission electron microscopy
- Focused ion beam technology
- Single crystals
- Crystal orientation
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