- Conference date: 3–8 August 2008
- Location: Monterey (California)
A new Galerkin finite element scheme for the numerical simulation of three‐dimensional time‐dependent flow of K‐BKZ fluids has been developed. The scheme was used to model the polymer melt flow in nano imprint lithography (NIL). In NIL a sub micrometer pattern is hot pressed onto a thin polymer film on a hard substrate. The numerical method is based on a Lagrangian kinematics description of the fluid, where the (Cartesian) coordinate system attached to the particles is discretized by ten‐node quadratic tetrahedral elements. The time integral in the K‐BKZ model is discretized by a quadratic interpolation ensuring third order convergence in time. The method has been benchmarked on the free surface problem of a filament stretched between two plates.
MOST READ THIS MONTH
MOST CITED THIS MONTH
Article metrics loading...