Skip to main content

News about Scitation

In December 2016 Scitation will launch with a new design, enhanced navigation and a much improved user experience.

To ensure a smooth transition, from today, we are temporarily stopping new account registration and single article purchases. If you already have an account you can continue to use the site as normal.

For help or more information please visit our FAQs.

banner image
Non‐Fluorine Plasma Strip of HDI Resist for 45 nm
USD
/content/aip/proceeding/aipcp/10.1063/1.3033655
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3033655
/content/aip/proceeding/aipcp/10.1063/1.3033655
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/proceeding/aipcp/10.1063/1.3033655
2008-11-03
2016-12-08

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=proceedings.aip.org/1066/10.1063/1.3033655&pageURL=http://scitation.aip.org/content/aip/proceeding/aipcp/10.1063/1.3033655'
Right1,Right2,Right3,