We have proposed the novel isotope
analysis technique with Resonance Ionization
Mass Spectrometry using Inductively Coupled Plasma as an atomic source (ICP‐RIMS). Each component of ICP‐RIMS is conceptually designed. We conclude that the orthogonal acceleration time‐of‐flight mass spectrometer (oa‐TOF‐MS) driven by a high‐repetition‐rate pulsed laser would be suitable system for ICP‐RIMS. We, additionally, suggest that the first vacuum stage of the vacuum interface, which is between the sampling and skimmer cones, is desired to maintain as low pressure as possible in order to suppress the Doppler broadening and to skim the supersonic jet effectively.