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Modeling Etching Plasmas: Needs and Challenges in Atomic and Molecular Data
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10.1063/1.3141690
/content/aip/proceeding/aipcp/10.1063/1.3141690
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3141690
/content/aip/proceeding/aipcp/10.1063/1.3141690
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/content/aip/proceeding/aipcp/10.1063/1.3141690
2009-05-02
2015-03-01
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Modeling Etching Plasmas: Needs and Challenges in Atomic and Molecular Data
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3141690
10.1063/1.3141690
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