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Mechanical Failure of Thin Ta and Cu/Ta Layers on Polyimide Substrates: A Synchrotron‐Based Technique for In Situ Characterization
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10.1063/1.3169250
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/content/aip/proceeding/aipcp/10.1063/1.3169250
2009-06-18
2014-07-13
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Scitation: Mechanical Failure of Thin Ta and Cu/Ta Layers on Polyimide Substrates: A Synchrotron‐Based Technique for In Situ Characterization
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3169250
10.1063/1.3169250
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