1887
banner image
oa
Post‐Deposition Annealing Analysis for Thin Films Using GIXRR/GIXRD
Rent:
Rent this article for
Access full text Conference Paper
/content/aip/proceeding/aipcp/10.1063/1.3251205
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/proceeding/aipcp/10.1063/1.3251205
2009-09-28
2014-10-21
This is a required field
Please enter a valid email address
229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Post‐Deposition Annealing Analysis for HfO2 Thin Films Using GIXRR/GIXRD
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3251205
10.1063/1.3251205
SEARCH_EXPAND_ITEM