1887
banner image
oa
Characterization of and Hafnium Silicate Films on
Rent:
Rent this article for
Access full text Conference Paper
/content/aip/proceeding/aipcp/10.1063/1.3251260
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/proceeding/aipcp/10.1063/1.3251260
2009-09-28
2014-10-21
This is a required field
Please enter a valid email address
229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Characterization of HfO2 and Hafnium Silicate Films on SiO2/Si
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3251260
10.1063/1.3251260
SEARCH_EXPAND_ITEM