- Conference date: 11–15 May 2009
- Location: Albany (New York)
Blanket layers, deposited with 2 to 40 ALD cycles, were measured using VUV‐SR. The measured thickness was compared to both XRR and process conditions. A linear correlation coefficient, of 0.9977 to the number of ALD cycles demonstrated sensitivity for the thickness range studied, 1.5 to 37 Å, while the mean repeatability for thickness measurements was 0.05 Å.
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