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Vacuum‐Ultraviolet Reflectometry of Ultra‐thin Films
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/content/aip/proceeding/aipcp/10.1063/1.3251263
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3251263
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/content/aip/proceeding/aipcp/10.1063/1.3251263
2009-09-28
2014-12-27
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Vacuum‐Ultraviolet Reflectometry of Ultra‐thin HfO2 Films
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3251263
10.1063/1.3251263
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