You must fill out fields marked with: *
Your recommendation has been sent to your librarian.
Optical resonances in microcavities are investigated numerically. A time‐harmonic finite‐element solver is used for simulating the effect of small geometry variations like sidewall‐angles and feature placement on a nanometer scale.
Article metrics loading...
Website © 2014 AIP Publishing LLC. Article
copyright remains as specified within the article.