High‐Angular‐Resolution Microbeam X‐Ray Diffraction with CCD Detector
- Conference date: 15–18 September 2009
- Location: Karlsruhe (Germany)
We have introduced a CCD‐type two‐dimensional X‐ray detector for a microbeam X‐ray diffraction system using synchrotron radiation, so that we can measure local reciprocal space maps (RSM) of samples rapidly. A local RSM of a strain‐relaxed SiGe 004 grown on a Si (001) substrate was measured in higher‐angular‐resolution and faster than a conventional way. The measurement was achieved in 1 h 40 min. with the 2θ resolution of 80 μrad and the spatial resolution of The introduction of the CCD enabled us to measure RSMs at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high‐angular‐ and high‐spatial‐resolution.
- Charge coupled devices
- Electromagnetic radiation detectors
- Radiation detectors
- Strain measurement
- Reciprocal space
- Spatial resolution
- Synchrotron radiation
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