- Conference date: 15–18 September 2009
- Location: Karlsruhe (Germany)
Elliptical, parabolic and Wolter type glass monocapillaries were fabricated for use as x‐ray condensers in the energy range of 250 eV to 20 keV. On a routine basis a diameter error of and straightness error of 0.8 μm (peak to valley) can be reached. The final test of condensers was performed at‐wavelength by imaging the far field x‐ray reflection intensity distribution using a laboratory microfocus x‐ray source. For medium length condensers with a total length <80 mm, a total slope error of 40 μrad rms was obtained. The applications in full‐field x‐ray microscopes and the future effort in developing capillary Wolter mirrors based on this technology are reported.
- Microstructure fabrication
- Optical fabrication
- Optical microscopy
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