- Conference date: 15–18 September 2009
- Location: Karlsruhe (Germany)
A new material combination namely Co/Mg multilayer designed for optics applications in the EUV range, is reported. Simulations show that reflectivity value of the Co/Mg multilayer can reach a reflectivity of 55% at 25.2 nm (49.2 eV), when the grazing incidence angle is set to 45° and s polarization is considered. The introduction of additional materials, e.g., Y and Zr can improve the reflectivity to 61%. Co/Mg and multilayers have been deposited following the parameters deduced from the simulations. The introduction of a barrier layer would in principle increase the multilayer reflectivity to 61%. In fact the reflectivity measurements at 0.154 nm show that the introduction of does not improve the structural quality of the multilayers.
- Extreme ultraviolet radiation
- Optical materials
MOST READ THIS MONTH
MOST CITED THIS MONTH
Y. K. Semertzidis, M. Aoki, M. Auzinsh, V. Balakin, A. Bazhan, G. W. Bennett, R. M. Carey, P. Cushman, P. T. Debevec, A. Dudnikov, F. J. M. Farley, D. W. Hertzog, M. Iwasaki, K. Jungmann, D. Kawall, B. Khazin, I. B. Khriplovich, B. Kirk, Y. Kuno, D. M. Lazarus, L. B. Leipuner, V. Logashenko, K. R. Lynch, W. J. Marciano, R. McNabb, W. Meng, J. P. Miller, W. M. Morse, C. J. G. Onderwater, Y. F. Orlov, C. S. Ozben, R. Prigl, S. Rescia, B. L. Roberts, N. Shafer‐Ray, A. Silenko, E. J. Stephenson, K. Yoshimura and EDM Collaboration
Article metrics loading...