Nano‐crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite
Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100° C, 150° C & 300° C by the high dense plasma of energy 1.3 k Joule on glass and silica.
Raman spectra confirmed that
content is grown in the films under various conditions. The Raman spectra of these films show a broad asymmetric peak which narrow with
decreasing contents. We believe that our data presented here may be used as reference of DLC characterization.