- Conference date: 20–22 October 2009
- Location: San Francisco (California)
Nano‐crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100° C, 150° C & 300° C by the high dense plasma of energy 1.3 k Joule on glass and silica. Raman spectra confirmed that content is grown in the films under various conditions. The Raman spectra of these films show a broad asymmetric peak which narrow with decreasing contents. We believe that our data presented here may be used as reference of DLC characterization.
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