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Optimization Of Dielectric And Elastic Properties Of Nanoporous Ultralow‐k Dielectric Materials
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10.1063/1.3527122
/content/aip/proceeding/aipcp/10.1063/1.3527122
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3527122
/content/aip/proceeding/aipcp/10.1063/1.3527122
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/content/aip/proceeding/aipcp/10.1063/1.3527122
2010-11-24
2014-11-26
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Optimization Of Dielectric And Elastic Properties Of Nanoporous Ultralow‐k Dielectric Materials
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.3527122
10.1063/1.3527122
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