- Conference date: 12–14 April 2010
- Location: Bad Schandau, (Germany)
The through‐thickness cohesive toughness is estimated by applying the cube‐corner indentation method for an organosilicate glass (OSG), cured by monochromatic UV irradiation to obtain oscillating elastic moduli across the film thickness. Radial cracks induced by cube‐corner indentation on as‐deposited OSG film shows a straight crack path, while the indentation on OSG film with elastic modulus oscillation shows a disturbed crack path. The cohesive toughness increases from to after monochromatic UV curing.
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