- Conference date: 15–20 August 2010
- Location: Chicago, Illinois, (USA)
We demonstrate the highest spatial resolution reported in scanning transmission x‐ray microscopy to date. For the first time in x‐ray microscopy, features below 10 nm in width were resolved in the soft x‐ray regime (1.2 keV) and 20‐nm lines and spaces were visible at multi‐keV photon energies (6.2 keV). These achievements were accomplished using zone‐doubled Fresnel zone plates. These lenses were fabricated by combining electron‐beam lithography and atomic layer deposition of iridium. Diffraction efficiencies up to 8% were measured for zone‐doubled Fresnel zone plates with an outermost zone width of 25 nm at 6.2‐keV photon energy.
- Zone plates
- Scanning microscopy
- Atomic layer deposition
- Diffraction efficiency
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