- Conference date: 1–5 May 2011
- Location: Cairo, (Egypt)
Laser‐induced Plasma spectroscopy (LIPS) is a useful method for determining the elemental composition of various materials but for long time it have been mainly restricted to qualitative and quantitative determination of samples. Recently LIPS is applied to depth‐profile analysis. The lines used in depth profiling are always chosen with great care. The lines chosen should be of nearly of the same height and in the same spectral window. These conditions should be in addition to the general conditions for the lines used in the LIPS as being isolated, non resonant and symmetric lines. All these conditions made it very hard to select a suitable line for depth profiling. In this paper we are trying to investigate the differences that may occur on changing the spectral lines obtained from Ti thin film deposited on a Si (100) substrate and to see the effect of normalization on the depth profiling experiment. It was found that after making normalization, the values of the Average Ablation Rate per pulse and the depth Resolution calculated differs from those calculated before normalization. Also it was found that any line fulfils the general LIPS conditions will give the same depth profile results.
MOST READ THIS MONTH
MOST CITED THIS MONTH
Article metrics loading...