- Conference date: 26–28 October 2011
- Location: Bad Honnef, (Germany)
We study a metal‐dielectric‐metal waveguide as an absorption modulator. The system consists of an indium tin oxide (ITO) layer and silicon nitride imbedded between two silver plates. We analyze the system and perform numerical simulations with the aim to increase transmittance and enhance modulation depth or efficiency. To advance the modulator design we propose to substitute the continuous layer by a 1D periodic grating and explore various anneal conditions to achieve different permittivity of the ITO.
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