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Multi‐technique Approach for the Evaluation of the Crystalline Phase of Ultrathin High‐k Gate Oxide Films
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/content/aip/proceeding/aipcp/10.1063/1.3657882
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/content/aip/proceeding/aipcp/10.1063/1.3657882
2011-11-10
2016-02-07

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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd