- Conference date: 27–29 June 2012
- Location: Ancona, Italy
One challenging application field of optical vibrometry is micro-and nanometrology. Since small structures resonate at high frequencies and with small vibration amplitudes this application area requires high spatial resolutions, high amplitude resolutions, and high measurement bandwidths. In addition, small structures are sensitive to heating because even a small heating energy can raise temperatures dramatically. Laser-Doppler technique provides amplitude resolutions down to the range of a few , but for some applications even lower resolutions are required. In this paper, I summarize interferometric measurement solutions from basic physics science branches where amplitude-noise levels in the attometer regime have been demonstrated empirically and I discuss if these resolutions can be transferred to industrial applications. In addition, I propose heterodyne interferometry for the broad bandwidth measurements of the electrical field vector of light and I derive the theoretic resolution limit for in-plane-vibration measurements for a new detection method for the first time.
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