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Measuring MEMS vibration with novel quasi-heterodyned laser interferometry
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/content/aip/proceeding/aipcp/10.1063/1.4730546
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4730546
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/content/aip/proceeding/aipcp/10.1063/1.4730546
2012-06-14
2016-02-10

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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd