- Conference date: 27–29 June 2012
- Location: Ancona, Italy
The paper presents novel interferometric measurement technique applied for MEMS dynamic properties measurements. The method was developed especially for multi-channel interferometer developed under SMARTIEHS EU project. The method employs sinusoidal modulation of light and novel smart-pixel camera detector. The measurement results obtained with developed measurement system and commercial Polytec system, obtained while measuring reference objects, are in good correspondence showing usefulness of proposed method.
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