- Conference date: 9–12 November 2011
- Location: Mumbai, India
Ultra and Extreme High Vacuum (UHV and XHV respectively) levels are needed in several vacuum-related applications for wide pressure and time range. The Non Evaporable Getter (NEG) technology is one of the most important examples to get XHV/UHV condition in the vacuum systems. In fact the high reactivity of the getter materials towards active gases in a wide temperature range (from room temperature to several hundreds of °C) allows removing very efficiently active gases such as H2, H2O, CO2, CO, N2, and so on. When declining, the pumping speed of NEG can be easily restored, by reactivating the getter material with a thermal process ("reactivation"). In this framework, SAES Getters S.p.A. has a long expertise in producing NEG pumps (and more in general NEG technology) which can provide vacuum conditions from the low to the ultra high level. An overall overview of NEG pump technology will be given in this paper considering 1) the involved mechanisms for gas adsorption into the NEG material, 2) operational conditions of NEG pumps and 3) example of applications which demonstrate the benefits of NEG pumps use in XHV/UHV systems. Future perspectives for NEG pumps in UHV/XHV applications will be also given.
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