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Ion implantation challenges for power devices
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10.1063/1.4766479
/content/aip/proceeding/aipcp/10.1063/1.4766479
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766479
/content/aip/proceeding/aipcp/10.1063/1.4766479
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/content/aip/proceeding/aipcp/10.1063/1.4766479
2012-11-06
2015-05-23
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Ion implantation challenges for power devices
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766479
10.1063/1.4766479
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