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Beyond 20nm DRAM peripheral transistor: Challenges and ion implantation solutions
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/content/aip/proceeding/aipcp/10.1063/1.4766480
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/content/aip/proceeding/aipcp/10.1063/1.4766480
2012-11-06
2016-07-28

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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
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