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Trench doping process for 3D transistors - 2D cross-sectional doping profiling study
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10.1063/1.4766493
/content/aip/proceeding/aipcp/10.1063/1.4766493
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766493
/content/aip/proceeding/aipcp/10.1063/1.4766493
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/content/aip/proceeding/aipcp/10.1063/1.4766493
2012-11-06
2014-12-19
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Trench doping process for 3D transistors - 2D cross-sectional doping profiling study
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766493
10.1063/1.4766493
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