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Cold implants of boron and manganese ions in Si, , and GaAs
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10.1063/1.4766495
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/content/aip/proceeding/aipcp/10.1063/1.4766495
2012-11-06
2014-08-20
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Scitation: Cold implants of boron and manganese ions in Si, SiO2 , and GaAs
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766495
10.1063/1.4766495
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