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Fluorine implantation in germanium for dopant diffusion control
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10.1063/1.4766503
/content/aip/proceeding/aipcp/10.1063/1.4766503
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766503
/content/aip/proceeding/aipcp/10.1063/1.4766503
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/content/aip/proceeding/aipcp/10.1063/1.4766503
2012-11-06
2014-11-28
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229c8a00d8fe88cf152414eb5d9cd803 conferences.conference_paperzxybnytfddd
Scitation: Fluorine implantation in germanium for dopant diffusion control
http://aip.metastore.ingenta.com/content/aip/proceeding/aipcp/10.1063/1.4766503
10.1063/1.4766503
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